Improved tungsten nanofabrication for hard X-ray zone plates
نویسندگان
چکیده
منابع مشابه
High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates
Hard x-ray nanoimaging enables structural investigations of newmaterials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen. Two methods of zone plate nanofabrication are presented in this thesis. Zone plates are circular diffraction gratings with radially decreasing grating period. Their optical resolution depends on the width of the smallest zo...
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The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electronbeam lithography, together with Cl2/O2 and SF6/O2 reactive ion etching in a trilayer resist-chromiumtungsten stack. The underlying diamond is then etched in an O2 plasma. The authors demonstrate excellent-...
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The technology to focus hard-X-rays (photon energy larger than 1–2 keV) has made great progress in the past three years. The progress was particularly spectacular for lenses based on the Fresnel zone plate concept. The spatial resolution notably increased by a factor of three, opening up entirely new domains of application, specifically in biomedical research. As we shall see, this evolution is...
متن کاملThermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation
Diffractive Fresnel zone plates made of tungsten show great promise for focusing hard x-ray free-electron laser (XFEL) radiation to very small spot sizes. However, they have to withstand the high-intensity pulses of the beam without being damaged. This might be problematic since each XFEL pulse will create a significant temperature increase in the zone plate nanostructures and it is therefore c...
متن کاملZone Plates for Hard X-Ray Free-Electron Lasers
Hard x-ray free-electron lasers are novel sources of coherent x-rays with unprecedented brightness and very short pulses. The radiation from these sources enables a wide range of new experiments that were not possible with previous x-ray sources. Many of these experiments require the possibility to focus the intense x-ray beam onto small samples. This Thesis investigates the possibility to use ...
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2016
ISSN: 0167-9317
DOI: 10.1016/j.mee.2015.12.015